Small-scale high-cycle fatigue testing by dynamic microcantilever bending
نویسندگان
چکیده
منابع مشابه
Various Fatigue Testing of Polycrystalline Silicon Microcantilever Beam in Bending
With the vast potential of micro-electro-mechanical systems (MEMS) technology, the reliability is essential for the successful applications of microdevices. Polycrystalline silicon is one of the most often used structural materials in microdevices. Tension testing for fatigue life of this material has been investigated since past years. This paper presents a micro-actuatorbased bending testing ...
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ژورنال
عنوان ژورنال: MRS Communications
سال: 2020
ISSN: 2159-6859,2159-6867
DOI: 10.1557/mrc.2020.31